Product Description
AUTO SPUTTERING COATER MACHINE
Main Features
- The 108 Auto Sputter Coater offers the choice of fully automated or manual operation. The specifications also include automatic vent (with a choice of vent gas) and argon purge control.
- In automatic mode, the coater can be controlled in two ways. The digital timer can be used to give repeatable coatings or the MTM-20 High Resolution Thickness Controller (optional) can be used to terminate the sputtering process at the desired thickness. Alternatively, the MTM-10 High Resolution Thickness Monitor (optional) may also be used for manual termination.
- The digital sputter current control is fully independent of the argon gas pressure in the sputtering chamber to achieve consistent sputtering rates and optimum specimen coverage.
- The efficient DC magnetron operates on a low voltage for "ultra-cool" sputtering to avoid effects on sample surface.
- Separate electronic valves for leak, purge and vent, coupled with a precise needle valve, ensures quick and easy operation.
- Quick target change allows for a range of materials used: Au, Au/Pd, Pt, Pt/Pd (Au fitted as standard).
- The 108 Auto Sputter Coater can be factory fitted or retrofitted at any time with our Prod. No. 93007, MTM-20 High Resolution Thickness Controller (optional).
Specifications:
- Chamber size: 120mm OD x 120mm height (4.75 x 4.75")
- Target: Au fitted as standard, Au:Pd, Pt, Pt:Pd optional; 57mm dia x0.1mm thick
- Sample table: Holds 12 SEM pin mounts; Height adjustable through 60mm
- Sputter supply: Microprocessor based, safety interlock, variable, 40mA maximum
- Programmable digital control Low voltage "ultra-cool" planar magnetron Quick target change
- Wrap-around dark-space shield
- Analog metering: Vacuum Atm - 0.001mb
- Thickness monitoring (optional): Use automatic terminating MTM-20 High Resolution Thickness Controller or MTM-10 High Resolution Thickness Monitor (manual terminating)
- Control method: Automatic operation of gas purge and leak functions Automatic process sequencing
- Full manual override Precision needle valve
- Digital timer (0-300 sec) with pause
- Automatic vent
- Desktop system: Vacuum pump is mounted on desktop compatible anti-vibration table
- All metal integrated coupling system
Requirements
- Electrical: 100-120 or 200-240 VAC, 50/60Hz(specify on order)
- Power: 500VA (coater and pumping system #7010 together)
- Argon gas: Purity, min. 99.99%
- Working pressure 5-6 psi (0.4 bar)
- Hose connection, 6.0mm (1/4")
- Accompanied with complete and compatible Auto Sputter Coater Accessories & Consumables such Target, vacuum system, thickness measurement system, Spares and Consumables for replacement ( at least 4 piece for each spare and consumable parts), RT stage, Vacuum Pumps/ dual stage rotary vane pumps etc.).
- Including compatible 40 pieces of Pt and Au target for SEM sample preparation
- Including installation, Training.
